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PATTERNED ETCHING OF INFRARED DETECTOR ARRAYS
Award Information
Agency: Department of Defense
Branch: Army
Contract: N/A
Agency Tracking Number: 12183
Amount:
$59,890.00
Phase:
Phase I
Program:
SBIR
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Timeline
Solicitation Year:
N/A
Award Year:
1990
Award Start Date (Proposal Award Date):
N/A
Award End Date (Contract End Date):
N/A
Small Business Information
45 Manning Rd
Billercia, MA
01821
United States
DUNS:
N/A
HUBZone Owned:
No
Woman Owned:
No
Socially and Economically Disadvantaged:
No
Principal Investigator
Name: Andrew Freedman
Phone: (508) 663-9500
Phone: (508) 663-9500
Business Contact
Phone: () -
Research Institution
N/A
Abstract
WE PROPOSE TO DEVELOP A PATTERNED ETCHING TECHNIQUE FOR INFRARED DETECTOR ARRAYS BASED ON PHOTO-INDUCED ETCHING OF HGCDTE THAT IS COMPATIBLE WITH THE ULTRA-HIGH VACUUM ENVIRONMENT OF A MOLECULAR BEAM EPITAXY APPARATUSES. THE PHASE I RESEARCH FOCUSES ON ESTABLISHING THE EFFICACY OF SUITABLE GAS PHASE PRECURSORS FOR THE ETCHING PROCESS. IF THE PHASE I RESEARCH IS SUCCESSFUL, OPTICAL PROJECTION TECHNIQUES WILL BE USED TO PRODUCE ARRAY STRUCTURES. SIMILAR TECHNIQUES MAY BE SUITABLE FOR MAKING OHMIC CONTACTS TO THE MESAS FORMED BY THE ETCHING STEP.
* Information listed above is at the time of submission. *
