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PROCESS MONITORING AND CONTROL DURING PLASMA PROCESSING OF SEMICONDUCTORS
Award Information
Agency: Department of Defense
Branch: Air Force
Contract: N/A
Agency Tracking Number: 14844
Amount:
$56,668.00
Phase:
Phase I
Program:
SBIR
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Timeline
Solicitation Year:
N/A
Award Year:
1991
Award Start Date (Proposal Award Date):
N/A
Award End Date (Contract End Date):
N/A
Small Business Information
Po Box 380343
East Hartford, CT
06138
United States
DUNS:
N/A
HUBZone Owned:
No
Woman Owned:
No
Socially and Economically Disadvantaged:
No
Principal Investigator
Name: Philip W Morrison Jr
Title: Principal Investigator
Phone: (203) 528-9806
Title: Principal Investigator
Phone: (203) 528-9806
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A
* Information listed above is at the time of submission. *