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In-Line Process Monitoring and Control for Poly-Silicon Formation Inside Cluster Tools
Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9460472
Agency Tracking Number: 29874
Amount:
$299,944.00
Phase:
Phase II
Program:
SBIR
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Timeline
Solicitation Year:
N/A
Award Year:
1997
Award Start Date (Proposal Award Date):
N/A
Award End Date (Contract End Date):
N/A
Small Business Information
87 Church Street
East Hartford, CT
06108
United States
DUNS:
N/A
HUBZone Owned:
No
Woman Owned:
No
Socially and Economically Disadvantaged:
No
Principal Investigator
Name: Peter Rosenthal
Phone: () -
Phone: () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A
* Information listed above is at the time of submission. *
