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NANOMETER-SIZE STEP HEIGHT TEST STRUCTURES

Award Information

Agency:
Department of Commerce
Branch:
N/A
Award ID:
17458
Program Year/Program:
1992 / SBIR
Agency Tracking Number:
17458
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1992
Title: NANOMETER-SIZE STEP HEIGHT TEST STRUCTURES
Agency: DOC
Contract: N/A
Award Amount: $34,991.00
 

Abstract:

MCNC PROPOSES A FEASIBILITY STUDY AND EVALUATION OF THREE PROMISING APPROACHES TO THE FABRICATION OF SURFACE TEST STRUCTURES ON SILICON. SURFACE FEATURES ON THE FIRST STRUCTURE WILL BE PRODUCED BY CONTROLLABLY ETCHING THERMALLYGROWN OXIDES. FEATURES ON THE SECOND WILL BE MADE BY ETCHING PIEZOELECTRIC THIN FILMS. USING THE PIEZOELECTRIC FILM AS PART OF A CAPACITOR, STEP-HEIGHT CAN BE VARIED AND PROVIDE FOR INTERNAL CALIBRATION. FEATURES ON THE THIRD STRUCTURE WILL BE FORMED BY ION-INDUCED SURFACE ROUGHENING. PHASE 1 WILL FOCUS ON EVALUATING THE TECHNICAL CHALLENGES AND COSTS OF FABRICATING EACH STRUCTURE. THE FABRICATION PARAMETERS TO BE EVALUATED ARE: (1) LITHOGRAPHIC PATTERNING;2) ETCHING AN OXIDE WITH ANGSTROM PRECISION AND ACCURACY; 3) DEPOSITING A PIEZOELECTRIC THIN FILM; 4) ETCHING A PIEZOELECTRIC THIN FILM; 5) ESTABLISHING THE SURFACE ROUGHNESS FOR GIVEN SPUTTER PARAMETERS; AND 6) FINDING A SUITABLE METAL OVERCOATING. IDENTIFICATION AND KNOWLEDGE OFTHE TECHNICAL DIFFICULTIES IN EACH OF THESE APPROACHES IN PHASE 1 WILL PERMIT THE PROPOSAL OF A PHASE 2 PROGRAM WITH HIGH CONFIDENCE IN TECHNICAL SUCCESS. PHASE 2 WILL FOCUS ONFABRICATING PROTOTYPE STRUCTURE(S) DEEMED MOST ECONOMICALLY FEASIBLE AND MOST LIKELY TO MEET ALL DOC PERFORMANCE REQUIREMENTS, ASSURING A SOUND BASIS FOR COMMERCIALIZATION.

Principal Investigator:

Richard C. Chapman
0

Business Contact:

Small Business Information at Submission:

Advanced Technology
P.O. Box 12889 Triangle Park, NC 27709

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No