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NOVEL PROCESS FOR THE THIN FILM GROWTH OF YBA2CU3O7

Award Information

Agency:
National Aeronautics and Space Administration 		Branch:
N/A 		Award ID:
11901 		Program Year/Program:
1991 / SBIR
Agency Tracking Number:
11901 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1991
Title: NOVEL PROCESS FOR THE THIN FILM GROWTH OF YBA2CU3O7
Agency: NASA
Contract: N/A
Award Amount: $499,941.00
 

Abstract:

REALIZATION OF THE PERFORMANCE ADVANTAGES OF SUPERCONDUCTING DEVICES IN HIGH FREQUENCY COMMUNICATIONS DEPENDS ON DEVELOPMENT OF A LOW TEMPERATURE DEPOSITION PROCESS WITH EXACTING CONTROL OF STOICHIOMETRY AND MORPHOLOGY. MOCVD CAN MEET THESE NEEDS COUPLED WITH EASE OFSCALE-UP. HOWEVER, RECENT WORK AT ADVANCED TECHNOLOGY MATERIALS, INC. SHOWS THAT YBACUO AND BISRCACUO FILMS GROWN BY MOCVD AT TEMPERATURES LESS THAN 800 DEGREES CENTIGRADE ARE AMORPHOUS MIXTURES OF OXIDES, WITH CAULIFLOWER-LIKE MORPHOLOGY INDICATIVE OF LOW SURFACE MOBILITY GROWTH. SURFACE MOBILITIES CAN BE ENHANCED THROUGH THE USE OF A PLASMA. MOREOVER, PLASMA ASSISTED LASER ABLATION, SPUTTERING AND REACTIVE EVAPORATION HAVE ALREADY BEEN UTILIZED FOR THE IN-SITU GROWTH OF SUPERCONDUCTING THIN FILMS AT 400-600 DEGREES CENTIGRADE. AT 600 DEGREES CENTIGRADE, A 50 EV OXYGEN ION BEAM OXIDIZED BAF2 TO BAO, WHICH SUGGESTS THAT PLASMA ENHANCED-CVD WILL EFFECT THE IN-SITU GROWTH OF SUPERCONDUCTING THIN FILMS WITH THE EXISTING REAGENTS AT 600 DEGREES CENTIGRADE OR BELOW. PHASE I WILL DEMONSTRATE THE GROWTH OF IN-SITU SUPERCONDUCTING THIN FILMS BY PECVD. PHASE II WILL FOCUS ONPROCESS OPTIMIZATION THRU THE CORRELATION OF PLASMA PROPERTIES DETERMINED BY IN-SITU DIAGNOSTICS WITH THE HTSC THIN FILM CHARACTERIZATION DATA. THIS WILL ALLOW A PHASE III SCALE-UP OF THE PECVD PROCESS TO MULTIWAFER PRODUCTION.

Principal Investigator:

James D. Parsons
Director, Mocvd Research
2033552681

Business Contact:

E. g. banucci
PRESIDENT
2033552681
Small Business Information at Submission:

Advanced Technology Materials
520-b Danbury Road New Milford, CT 06776

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No