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THE CONSTRUCTION OF A SOFT X-RAY SOURCE USING TRANSITION RADIATION FOR LITHOGRAPHY

Award Information
Agency: Department of Energy
Branch: N/A
Contract: N/A
Agency Tracking Number: 2481
Amount: $49,928.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1985
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
285 Hamilton Suite 430
Woodside, CA 94062
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Dr. Melvin A. Piestrup
 Prinicipal Investigator
 (415) 851-0633
Business Contact
Phone: () -
Research Institution
N/A
Abstract

N/A

* Information listed above is at the time of submission. *

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