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Semiconductor Nanomembrane based Sensors for High Frequency Pressure Measurements

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: FA9550-14-C-0014
Agency Tracking Number: F13A-T15-0099
Amount: $150,000.00
Phase: Phase I
Program: STTR
Solicitation Topic Code: AF13-AT15
Solicitation Number: 2013.
Timeline
Solicitation Year: 2013
Award Year: 2014
Award Start Date (Proposal Award Date): 2014-05-15
Award End Date (Contract End Date): 2014-10-31
Small Business Information
VA
Pembroke, VA 24136-3645
United States
DUNS: 008963758
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Hang Ruan
 PI
 (540) 626-6266
 hruan@nanosonic.com
Business Contact
 Melissa Campbell
Title: CFO
Phone: (540) 626-6266
Email: mcampbell@nanosonic.com
Research Institution
 Virginia Tech
 Wing Ng
 
122 Randolph Hall
Blacksburg, VA 24061-
United States

 (540) 231-7274
 Nonprofit College or University
Abstract

ABSTRACT: The Air Force Phase I program would develop and demonstrate semiconductor nanomembrane (NM) based sensors and arrays for high frequency pressure measurements, using SOI (Silicon on Insulator) NM technique in combination with our pioneering HybridsilTM copolymer nanocomposite materials. NanoSonic would work cooperatively with Virginia Tech to develop an improved mechanical and electrical model of semiconductor nanomembrane based sensor performance that will allow quantitative optimization of material properties and suggest optimal methods for sensor attachment and use for high frequency measurement applications. We will perform synthesis of sensor skin materials with optimized transduction, hysteresis and environmental properties, specifically for high Reynold"s number flow and also varying temperature use. We will fabricate patterned two-dimensional sensor arrays and internal electronics using optimized materials. NanoSonic and Virginia Tech will perform complete analysis of sensor cross-sensitivities and noise sources to allow optimization of signal-to-noise ratio and practical sensor sensitivity. Support electronics will be developed to acquire, multiplex, store and process raw sensor array data. NanoSonic and Virginia Tech will also experimentally validate sensor array performance through extended water and wind tunnel evaluation, and possible flight testing with Lockheed Martin Aeronautics, and produce a first-generation high temperature high frequency pressure sensor array and data acquisition electronics system for sale. BENEFIT: Primary customers would be university, government laboratory and aerospace industry researchers. Small, unmanned air vehicles large enough to carry the extra load associated with electronics and power, and operationally sophisticated enough to require air data sensors would be a likely first military platform use. Distributed pressure mapping on air vehicles as well as in biomedical devices and other systems may have merit. Further, the thin film shear sensor elements may be used as air flow or water flow devices in systems where either the low weight, low surface profile, lack of need for space below the flow surface, or high sensitivity at a low cost are needed.

* Information listed above is at the time of submission. *

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