USA flag logo/image

An Official Website of the United States Government

Company Information:

Company Name: Abek Inc.
City: Colorado Springs
State: CO
Zip+4: 80915
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Website URL: N/A
Phone: (303) 506-3509

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $40,000.00 1

Award List:

LITHOGRAPHY USING CONVENTIONAL, COMMERCIAL RESIST SYSTEMS

Award Year / Program / Phase: 1984 / SBIR / Phase I
Agency: NSF
Principal Investigator: Salvatore p. diiorio , INVESTIGATOR
Award Amount: $40,000.00
Abstract:
By optimizing conditions, conventional electron beam by optimizing conditions, conventional electron beam resists, such as pbs, can be used to produce geometries in the 0.3 to 0.5 micron range in a controlled manner, using raster scan writing techniques in a limited production environment. in order… More