Massively Redundant Electromechanical Actuators

We propose to design, build and analyze Massively Redundant Electromechanical (MREM) Actuators based on multilayer, electrostatic motors. The key element is combining many wafer-scale components to produce a highly reliable large-scale actuator. The device consists of many individual actuator modules which allows it to be scaled up or down in size, force and power. Each module contains interleaved layers of stator and mover wafers. The stator and mover wafers are arrayed with electrodes that provide the electrostatic forces that drive the actuator. Each stator wafer has three sets of interdigitated electrodes that can be independently charged to the maximum voltage (270 volts) or kept at ground (zero volts). Each mover wafer has one set of electrodes that is always grounded. Appropriately switching the voltages on the stator electrodes drives the mover layers with high velocity and force. MREM actuators will be extremely reliable because they are based on wafer-level components fabricated with mature and tested MEMS techniques. The protection against catastrophic failure is enhanced by the modular architecture of the MREM actuators. Inadequate performance of any of the modules can be detected and corrected before it has a significant impact on the whole device.