Rapid and Precise Metrology for Advanced Optical Components

Under this proposed SBIR effort, Bridger Photonics, Inc. (Bridger) will advance its industry-leading length metrology capabilities to reach sub-10-nanometer precision,>40 Hz update rate,>10 cm measurement range, and sufficient sensitivity to enable measurement of high reflection angles (>5 degrees) on ceramic materials with bulk scattering. Bridger will integrate this metrology system with OptiPro System"s UltraSurf precision stage to enable an order of magnitude improvement in both the manufacturing time and precision compared to existing solutions. This capability will directly lead to increased manufacturing throughput and decreased manufacturing cost. To accomplish these goals the team proposes three technical objectives for the Phase I effort. First, performance enhancements for measuring advanced IR materials will be conducted. Second, Bridger will provide hardware enhancements to allow for faster measurement rates. Bridger will utilize an in-house prototype SLM-M metrology system for testing these proposed enhancements on OptiPro"s UltraSurf system with components provided by the sponsor. Finally, from the lessons learned during this testing, the team will determine the feasibility for incorporating these performance enhancements. During a possible Phase I Option, Bridger will refine the mechanical, electrical and optical design for its SLM-M system in order to incorporate these performance enhancements into future systems.