This Small Business Innovation Research Phase 1 research project will develop a novel MEMS capacitive pressure sensor which may be used for making highly accurate water depth measurements. Intended for use in regulated, long-term, unattended environmental monitoring of ground water, the device will… More
Award Year / Program / Phase:2009 / SBIR / Phase I
Agency:NASA
Principal Investigator:Zachary Gray, Principal Investigator
Award Amount:$100,000.00
Abstract:
A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of… More
This Small Business Innovation Research (SBIR) Phase 1 project will develop an active microvalve for control of refrigerant fluids. Intended for use in refrigerators and air conditioners, the device will meet or exceed stringent industry standards for reliability, efficiency, and cost. The transfer… More