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AUTOMATED MBE PROCESS WITH REAL TIME SENSOR CONTROL

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: N/A
Agency Tracking Number: 15043
Amount: $478,606.00
Phase: Phase II
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1992
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
7388 Washington Avenue
Eden Prairie, MN 55344
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Peter P Chow
 Principal Investigator
 (612) 941-1898
Business Contact
Phone: () -
Research Institution
N/A
Abstract

WE PROPOSE AN AUTOMATED MOLECULAR BEAM EPITAXY (MBE) PROCESS FOR REPRODUCTABLE GROWTH OF SEMICONDUCTOR DEVICE STRUCTURES. WE WILL APPLY RHEED AND THERMAL OSCILLATION TECHNIQUES TO CONTROL THE RATE ANDCOMPOSITION OF THE LAYERS AND TO ENSURE THAT THE GROWTH PROCEEDS UNDEROPTIMUM CONDITIONS. A MASS SPECTROMETER WILL BE USED TO CONTROL DOPANT INCORPORATION LEVELS. FLUXES FOR OPTIMUM GROWTH OF THE DIFFERENCT LAYERS ARE MATCHED BY FEEDBACK CONTROLLING AN ADJUSTABLE COLUMN V CRACKER SOURCE. VARIOUS SENSOR INPUT WILL BE USED BY A MICROPROCESSOR TO CONTROL OTHER PARAMETERS AS WELL. THE MBE TECHNIQUEHAS BEEN USED FOR PRODUCTION OF MANY HIGH PERFORMANCE SEMICONDUCTOR DEVICES. THE PROPOSED INVESTIGATION WILL BE PERFORMED IN A MBE SYSTEMTHAT HAS INCORPORATED SIGNIFICANT ADVANCES IN MACHINE DESIGN TO IMPROVE RELIABILITY AND MATERIAL YIELD. THE IMPROVEMENTS INCLUDE LARGE CAPACITY TAPERED EFFUSION CELL, TWO ZONE CELL HEATING, A MICROPROCESSOR CONTROLLED CRACKER SOURCE, AND LONG-LIFE (> 1 MILLION CYCLES) SHUTTERS. THIS AUTOMATED PROCESS CAN BE USED FOR PRODUCTION OF A VARIETY OF COMPOUNDS AND CAN BE APPLIED TO SOLID SOURCE AS WELL AS GAS SOURCE MBE.

* Information listed above is at the time of submission. *

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