HYPOCYCLOIDAL PINCH (HCP) DEVICE FOR X-RAY LITHOGRAPHY

THE EVOLUTION OF VLSIC TECHNOLOGY FURTHER DEMANDS INNOVATIVE AND FAST SUBMICRON LITHOGRAPHY WHICH COULD REPLICATE MORE DENSELY PACKED IC AT A HIGH THROUGHPUT. THE PROPOSED HYPOCYCLOIDAL PINCH (HCP) LIGHT SOURCE IS CONSIDERED TO BE AN INTENSE X-RAY SOURCE SUITABLE FOR SUBMICRON AND HIGH THROUGHPUT LITHOGRAPHY. THIS DEVICE HAS A NOVEL GEOMETRY WHICH UTILIZES THE PLASMA DYNAMICS HYPOCYCLOIDALLY PINCHED INTO THE RADIAL DIRECTION AND EVENTUALLY RESULTING IN A VERY STABLE, HIGH ENERGY, AND HIGHLY DENSE PLASMA IN ITS AXIAL CENTER. THE EMISSION SPECTRA FROM THIS HIGHLY COMPRESSED AND STABLE PLASMA IS COMPOSED MAINLY OF A WAVEBAND OF INTENSE SOFT X-RAY. THE SIZE OF PINCHED PLASMA IS SO SMALL IN DIAMETER THAT THE PENUMBRA EFFECT CAN BE ALSO MINIMIZED IN THE PHOTO-LITHOGRAPHY. THIS STABLE AND HIGHLY COMPRESSED PLASMA GUARANTEES THE REPRODUCIBILITY OF THE SOFT X-RAY EMISSION AND ITS INTENSE EMISSION ENSURES THE FAST THROUGHTPUT. THE PROPOSED HCP SOFT X-RAY LIGHT SOURCE IS ANINEXPENSIVE SYSTEM, SO THAT IT IS IDEAL FOR THE SMALL BUSINESS ENTITIES AND UNIVERSITY LABORATORIES.