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HIGH ACCURACY FLOW CONTROLLER FOR PROCESS CONTROL OF CHEMICAL VAPOR DEPOSITION
Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 21732
Amount:
$49,997.00
Phase:
Phase I
Program:
SBIR
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Timeline
Solicitation Year:
N/A
Award Year:
1993
Award Start Date (Proposal Award Date):
N/A
Award End Date (Contract End Date):
N/A
Small Business Information
20 New England Business Ctr
Andover, MA
01810
United States
DUNS:
N/A
HUBZone Owned:
No
Woman Owned:
No
Socially and Economically Disadvantaged:
No
Principal Investigator
Name: Karen L Carleton
Phone: (508) 689-0003
Phone: (508) 689-0003
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A
* Information listed above is at the time of submission. *
