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Fluorine Atom Beam Hyper-Thinning of Silicon

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: N/A
Agency Tracking Number: 25804
Amount: $58,331.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1994
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
20 New England Business Center
Andover, MA 01810
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Alan Gelb
 (508) 689-0003
Business Contact
Phone: () -
Research Institution
N/A
Abstract

We propose to develop a fluorine atom source for hyper-thinning "as-built" silicon wafers and separated integrated-circuit devices. This neutral-beam approach, based upon our fast atom sample tester (FAST) technology, does not produce high-energy ions; thus, it avoids the bombardment damage and the chemical complexity of plasma-assisted dry etching. The FAST apparatus will be reconfigured to yield an intermediate-energy high-flux fluorine atom beam; specifically, 1 to 10 eV, 10-16 to 10-17 atoms/cm-2-s. The beam will be diagnosed, process parameters will be determined, and operational maps will be constructed. Hyper-thinning of silicon substrates will be demonstrated, and the absence of both damage and surfgace residues will be verified. In collaboration with the Semiconductor Division of M/A COM, the fluorine FAST process will be assessed for production use. One or more device lines will be selected as the Phase II test-bed. The process flow charts will be modified to accommodate fluorine atom beam thinning, and changes in product yield will be estimated. The technical benefits and market advantages of the hyper-thin components in the proposed baseline technology will be projected. Finally, a business plan will be written, in order to evaluate the acquisition of the fluorine FAST process by M/A COM.

* Information listed above is at the time of submission. *

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