You are here

LARGE FILED-SIZE HOLOGRAPHIC LITHOGRAPHY FOR FLAT PANEL FABRICATION

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: N/A
Agency Tracking Number: 10039
Amount: $100,177.00
Phase: Phase II
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1992
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
2545 W 237th St - Ste B
Torrance, CA 90505
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Dr Ray T Chen
 (213) 320-3088
Business Contact
Phone: () -
Research Institution
N/A
Abstract

IN THIS PROGRAM, THE FEASIBILITY OF PRODUCING A HOLOGRAPHIC LITHOGRAPHY MACHINE WILL BE INVESTIGATED. SUCH A MACHINE SHOULD HAVE HIGH RESOLUTION, LARGE FIELD MASKS, AND MINIMUM ABERRATION. BOTH THEORETICAL AND EXPERIMENTAL EFFORTS WILL BE MADE IN PHASE I TO FULLY DETERMINE THE LIMITS OF THIS APPROACH AND THE POSSIBILITY OF DESIGNING A PRACTICAL LITHOGRAPHY MACHINE FOR INTEGRATED CIRCUIT APPLICATIONS. TECHNICAL ISSUES INCLUDING MATERIAL REQUIREMENTS, DIFFRACTION LIMIT OF DIFFERENT HOLOGRAPHIC OPTICAL SYSTEM (HOS), ABERRATION, MAGNIFICATION/DEMAGNIFICATION, NOISE ELIMINATION AND POWER DISTRIBUTION AND UNIFORMITY ARE TO BE INTENSIVELY STUDIED WITHIN THE TIME FRAME OF PHASE I. HOLOGRAPHIC MATERIALS THAT CAN PROVIDE IMAGE RESOLUTION <0.1 UM IS AVAILABLE IN THIS PROGRAM BASED ON POC'S PROPRIETARY HOE FABRICATION LABORATORY. LARGE NUMERICAL APETURE AND FEATURE SIZE ARE PROVIDED WITH OUR NOVEL RECORDING AND RECONSTRUCTION GEOMETRY WHICH USES GUIDED WAVE AND EVANESCENT WAVE AS A REFERENCE BEAM. THE HOLOGRAPHIC MACHINE PROPOSED IN THIS PROGRAM EXCLUDES THE EXPENSIVE OPTICAL PARTS ASSOCIATED E-BEAM AND X-RAY LITHOGRAPHY. THEREFORE, THE GOAL OF COST EFFECTIVENESS WILL ALSO BE ACHIEVED.

* Information listed above is at the time of submission. *

US Flag An Official Website of the United States Government