A LASER SURFACE PROFILOMETER FOR STEEP ASPHERIC SURFACES

Award Information

Agency: Department of Energy

Branch: N/A

Contract: N/A

Agency Tracking Number: 7719

Amount: $496,452.00

Phase: Phase II

Program: SBIR

Solicitation Topic Code: N/A

Solicitation Number: N/A

Timeline

Solicitation Year: N/A

Award Year: 1989

Award Start Date (Proposal Award Date): N/A

Award End Date (Contract End Date): N/A

Small Business Information

Optra, Inc.

West Peabody Office Park 83 Pine Street

Peabody, MA 01960

United States

DUNS: N/A

HUBZone Owned: No

Woman Owned: No

Socially and Economically Disadvantaged: No

Principal Investigator

Name: Dr C F Chen
Phone: () -

Business Contact

Name: DR JAMES R ENGEL
Phone: (617) 535-7670

Research Institution

N/A

Abstract

THE DEVELOPMENT OF AN INTERFEROMETRIC SURFACE PROFILOMETER IS PLANNED. KEY PHASE I PERFORMANCE SPECIFICATIONS INCLUDE PRECISION AND RESOLUTION FOR STEEP ASPHERIC SURFACES OF 2.5NM IN SURFACE HEIGHT MEASUREMENT, A SPATIAL RESOLUTION OF 0.2MM, AND THE ABILITY TO HANDLE SURFACE SLOPES IN THE RANGE 25 DEGREES WITH A LINEAR TRADE-OFF BETWEEN THESE TWO PARAMETERS. DURING PHASEII IT IS ANTICIPATED THAT PERISCOPIC OPTICS WILL BE DEVELOPED (TO INSPECT THE INTERIOR OF CYLINDRICAL SURFACES) AND THAT IMPROVEMENTS IN SPATIAL RESOLUTION MAY BE ACHIEVED. THE PROPOSED INSTRUMENT IS BASED ON THE USE OF A TWO-FREQUENCY HENE LASER, AND IS AN EVOLUTION FROM A BREADBOARD INSTRUMENT THAT HAS EXHIBITED SUBNANOMETER HEIGHTRESOLUTION AND 2 MICRON SPATIAL RESOLUTION.

* Information listed above is at the time of submission. *

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A LASER SURFACE PROFILOMETER FOR STEEP ASPHERIC SURFACES