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GROWTH OF EPITAXIAL OXIDE FILMS ON SILICON
Phone: (602) 438-2300
THE RESARCH DEMONSTRATES EPITAXIAL GROWTH, BY LASER ABLATION IN A UHV VACUUM SYSTEM OF HIGH QUALITY, INSULATING OXIDE FILMS ONTO HEATED SINGLE CRYSTAL SILICON SUBSTRATES, FOLLOWED BY CVD EPITAXIAL GROWTH OF SILICON ONTO THE INSULATING OXIXDE. THE RESEA CHERS ARE FOCUSING ON MGO, CEO2, AND PRO2 AS THE CANDIDATE EPITAXIAL INSULATING LAYERS. BOTH THE LASER ABLATED EPITAXIAL OXIDE FILMS AND THE CVD EPITAXIAL SILICON FILMS ARE CHARACTERIZED FOR CRYSTAL QUALITY AND ELECTRICAL PROPERTIES. CRYSTAL QUALITY IS MONITORED IN SITU DURING GROWTH BY REFLECTION HIGH ENERGY ELECTRON DIFFRACTION. THE GOAL FOR THIS WORK IS TO ENABLE A SILICON-ON-INSULATOR STRUCTURE IN WHICH THE INSULTOR IS GROWN EPITAXIALLY.
* Information listed above is at the time of submission. *