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ELECTRON CYCLOTRON RESONANCE (ECR) SEMICONDUCTOR ETCHING PROCESS CONTROL BY ELLIPSOMETRY

Award Information
Agency: Department of Defense
Branch: Army
Contract: N/A
Agency Tracking Number: 18614
Amount: $50,000.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1992
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
650 J Street, Suite 39
Lincoln, NE 68508
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Blaine Johs
 (402) 477-9116
Business Contact
Phone: () -
Research Institution
N/A
Abstract

N/A

* Information listed above is at the time of submission. *

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