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ELECTRON CYCLOTRON RESONANCE (ECR) SEMICONDUCTOR ETCHING PROCESS CONTROL BY ELLIPSOMETRY
Award Information
Agency: Department of Defense
Branch: Army
Contract: N/A
Agency Tracking Number: 18614
Amount:
$50,000.00
Phase:
Phase I
Program:
SBIR
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Timeline
Solicitation Year:
N/A
Award Year:
1992
Award Start Date (Proposal Award Date):
N/A
Award End Date (Contract End Date):
N/A
Small Business Information
650 J Street, Suite 39
Lincoln, NE
68508
United States
DUNS:
N/A
HUBZone Owned:
No
Woman Owned:
No
Socially and Economically Disadvantaged:
No
Principal Investigator
Name: Blaine Johs
Phone: (402) 477-9116
Phone: (402) 477-9116
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A
* Information listed above is at the time of submission. *