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CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response
Title: Principal Investigator
Phone: (734) 302-1140
Email: nyazdi@evigia.com
Title: Business Official
Phone: (734) 302-1140
Email: nyazdi@evigia.com
This Phase I SBIR effort initiates development of a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.
* Information listed above is at the time of submission. *