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SBIR Phase I: Piezo-Driven Inertial Stages for UHV
Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0232923
Agency Tracking Number: 0232923
Amount:
$99,999.00
Phase:
Phase I
Program:
SBIR
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Timeline
Solicitation Year:
N/A
Award Year:
2003
Award Start Date (Proposal Award Date):
N/A
Award End Date (Contract End Date):
N/A
Small Business Information
205 Williamson Square
Franklin, TN
37064
United States
DUNS:
N/A
HUBZone Owned:
No
Woman Owned:
No
Socially and Economically Disadvantaged:
No
Principal Investigator
Name: Jeffrey Paine
Phone: () -
Phone: () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
This Small Business Innovation Research Phase I project will develop a piezoelectric motor-drive with Ultra-High-Vacuum (UHV) compatibility for high-speed driving of positioning platforms. The proposed piezoelectric motor-drive will provide an as-yet unrealized combination of several desirable characteristics: nanometer and sub-nanometer precision; speeds in excess of 500 mm/s; drive capacities in the range of 10's of kilograms; and, ranges of travel in excess of 500 mm.
The commercial potential of this concept will provide a revolutionary means for rapid and accurate materials handling for fabrication, inspection, metrology, and packaging of microparts and microsystems.
* Information listed above is at the time of submission. *
