ELECTRON BEAM IMAGABLE POLYIMIDES

Award Information

Agency: National Science Foundation

Branch: N/A

Contract: N/A

Agency Tracking Number: 691

Amount: $191,208.00

Phase: Phase II

Program: SBIR

Solicitation Topic Code: N/A

Solicitation Number: N/A

Timeline

Solicitation Year: N/A

Award Year: 1985

Award Start Date (Proposal Award Date): N/A

Award End Date (Contract End Date): N/A

Small Business Information

Brewer Science Incorporated

P.o. Box Gg Rte. 5, Northwye

Rolla, MO 65401

United States

DUNS: N/A

HUBZone Owned: No

Woman Owned: No

Socially and Economically Disadvantaged: No

Principal Investigator

Name: Dr. Perry Brewer
Phone: () -

Business Contact

Phone: () -

Research Institution

N/A

Abstract

THE FEASIBILITY OF DEVELOPING POLYIMIDE PRECURSORS WHICH CANBE DIRECTLY IMAGED BY ELECTRON-BEAMS WILL BE INVESTIGATED. THESE DIELECTRICS WILL HAVE ALL OF THE ADVANTAGES OF POLYIMIDES, AND SAVE PROCESS STEPS BECAUSE THEY WILL BE DIRECTLY IMAGABLE. INTEGRATED CIRCUIT PROCESS TESTS WHICH INCLUDE THICKNESS AND UNIFORMITY OF COATINGS, ADHESION TESTS, AND THERMAL STABILITY WILL BE PERFORMED. THE SENSITIVITY OF THE POLYIMIDE PRECURSORS TO ELECTRON BEAMS, AND THEIR RESOLUTION WILL BE TESTED. IT IS ANTICIPATED THAT THESE TWO IMPORTANT PROPERTIES WILL BE THE MOST DIFFICULT TO ATTAIN SO PERFORMANCE GOALS HAVE BEEN SET TO DETERMINE FEASIBILITY. GPC, NMR AND IR CHEMICAL ANALYSES WILL BE DONE ON THE MOST PROMISING POLYMERS. BECAUSE THE POLYIMIDE REMAINS ON THE INTEGRATED CIRCUIT ITS ELECTRICAL PROPERTIES MUST MEET CERTAIN REQUIREMENTS. RESISTIVITY WILL BE TESTED. THIS PROPERTY SHOULD ALSO MEET A PERFORMANCE OBJECTIVE FOR THE PROGRAM TO BE FEASIBLE FOR PHASE II FUNDING. THE RESISTIVITY OF E-BEAM EXPOSED POLYIMIDE WILL BE MEASURED ALSO TO ENSURE THAT EXPOSURE DOES NOT ADVERSELY AFFECT ITS PERFORMANCE AS A DIELECTRIC.

* Information listed above is at the time of submission. *

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ELECTRON BEAM IMAGABLE POLYIMIDES