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ATOMIC PRECISION SYSTEMS, INC.
Company Information
Information
UEI: M1V5HLL86KC7
# of Employees: 2
Ownership Information
HUBZone Owned: No
Socially and Economically Disadvantaged: No
Woman Owned: No
Award Charts
Award Listing
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SBIR Phase II: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films
Amount: $499,908.00The Small Business Innovation Research (SBIR) Phase II project will develop a novel high-speed Atomic Layer Deposition technology comprising an ALD reactor and associated thin film processes for GaN t ...
SBIRPhase II2008National Science Foundation -
SBIR Phase I: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films
Amount: $100,000.00This Small Business Innovation Research Phase I project proposes to develop a high-speed and flexible prototype Atomic Layer Deposition (ALD) system suitable for its adaptation to an in-situ precursor ...
SBIRPhase I2007National Science Foundation